@conference{37061,
  author = {Ravikiran Attota and Ronald Dixson and John Kramar and James Potzick and Andras Vladar and Benjamin Bunday and Erik Novak and Andrew Rudack},
  title = {TSOM Method for Semiconductor Metrology},
  year = {2011},
  number = {7971},
  month = {2011-04-18},
  publisher = {SPIE Advanced Lithography, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908177},
  language = {en},
}