@article{37056,
  author = {Ravikiran Attota and Richard Silver},
  title = {Through-focus scanning optical microscope imaging method for nano-scale dimensional analysis},
  year = {2008},
  number = {33},
  month = {2008-09-01},
  publisher = {Optics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824668},
  language = {en},
}