@article{37036,
  author = {Pavel Kabos and Thomas Wallis and H Hubner and I. Humer and M. Hochleitner and M. Fenner and M. Moertelmaier and C. Rankl and Atif Imtiaz and H. Tanbakuchi and P. Hinterdorfer and J. Smoliner and Joseph Kopanski and F. Kienberger},
  title = {Calibrated nanoscale dopant profiling using a scanning microwave microscope.},
  year = {2012},
  number = {111},
  month = {2012-01-03},
  publisher = {Review of Scientific Instruments},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908761},
  language = {en},
}