@article{37016,
  author = {Ronald Dixson and Ndubuisi Orji and Craig McGray and John Bonevich and Jon Geist},
  title = {Traceable Calibration of a Critical Dimension Atomic Force Microscope},
  year = {2012},
  number = {11},
  month = {2012-03-09},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  language = {en},
}