@article{36256,
  author = {James Maslar and William Kimes and Brent Sperling},
  title = {In Situ Gas Phase Measurements During Metal Alkylamide Atomic Layer Deposition},
  year = {2011},
  number = {11},
  month = {2011-07-12},
  publisher = {Journal of Nanoscience and Nanotechnology},
  language = {en},
}