@article{36241,
  author = {James Maslar and William Kimes and Brent Sperling},
  title = {In Situ Gas Phase Diagnostics for Titanium Nitride Atomic Layer Deposition},
  year = {2011},
  number = {41},
  month = {2011-10-14},
  publisher = {ECS Transactions},
  language = {en},
}