@article{36221,
  author = {Richard Silver and Bryan Barnes and Ravikiran Attota and Jay Jun and Michael Stocker and Egon Marx and Heather Patrick},
  title = {Extending the Limits of Image-Based Optical Metrology},
  year = {2007},
  number = {46},
  month = {2007-06-20},
  publisher = {Applied Optics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823218},
  language = {en},
}