@article{33856,
  author = {Craig McGray and Richard Kasica and Ndubuisi Orji and Ronald Dixson and Michael Cresswell and Richard Allen and Jon Geist},
  title = {Robust Auto-Alignment Technique for Orientation-Dependent Etching of Nanostructures},
  year = {2012},
  number = {11},
  month = {2012-05-29},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908076},
  language = {en},
}