@misc{32686,
  author = {Gregory Tassey},
  title = {Planning Report 07-2: Economic Impact of Measurement in the Semiconductor Industry},
  year = {2007},
  month = {2007-12-31},
  publisher = {Other, National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912236},
  language = {en},
}