@article{32136,
  author = {Andras Vladar and John Villarrubia and Michael Postek and Petr Cizmar},
  title = {Can We Get 3D CD Metrology Right?},
  year = {2012},
  number = {8324},
  month = {2012-04-19},
  publisher = {Proceedings of SPIE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911117},
  language = {en},
}