@conference{32056,
  author = {Martin Sohn and Richard Quintanilha and Bryan Barnes and Richard Silver},
  title = {193 nm Angle-Resolved Scatterfield Microscope for Semiconductor Metrology},
  year = {2009},
  number = {7405},
  month = {2009-08-24},
  publisher = {Proceedings SPIE Optics & Photonics, San Diego, CA},
  language = {en},
}