@conference{32051,
  author = {Michael Postek and Andras Vladar and Bin Ming},
  title = {Recent Progress in Understanding the Imaging and Metrology using the Helium Ion Microscope},
  year = {2009},
  month = {2009-09-01},
  publisher = {2009 SCANNING/SPIE Proceedings, Monterrey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902762},
  language = {en},
}