@conference{32046,
  author = {Michael Postek and Andras Vladar and Bin Ming},
  title = {Understanding Imaging and Metrology with the Helium Ion Microscope},
  year = {2009},
  month = {2009-03-01},
  publisher = {FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS , Albany, NY},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902394},
  language = {en},
}