@misc{32041,
  author = {Michael Postek and Andras Vladar and John Villarrubia},
  title = {Nanometrology Solutions Using an Ultra-High Resolution In-lens SEM},
  year = {2009},
  month = {2009-09-01},
  publisher = {Hitachi News},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902308},
  language = {en},
}