@conference{31321,
  author = {Theodore Vorburger and Ronald Dixson and Ndubuisi Orji and Joseph Fu and Richard Allen and Michael Cresswell and Vincent Hackley},
  title = {Nano- and Atom-scale Length Metrology},
  year = {2010},
  month = {2010-10-01},
  publisher = {2nd International Conference on Surface Metrology, Worcester, MA},
  language = {en},
}