@article{29821, author = {J Tiffany and Richard Cavicchi and Stephen Semancik}, title = {Microarray Study of Temperature Dependent Sensitivity and Selectivity of Metal/Oxide Sensing Interfaces}, year = {2000}, number = {4205}, month = {2000-11-05}, publisher = {Proceedings of SPIE}, doi = {https://doi.org/10.1117/12.417456}, language = {en}, }