@article{29741, author = {Richard Cavicchi and Stephen Semancik and F DiMeo and C Taylor}, title = {Use of Microhotplates in the Controlled Growth and Characterization of Metal Oxides for Chemical Sensing}, year = {2003}, number = {9}, month = {2003-12-01}, publisher = {Journal of Electroceramics}, doi = {https://doi.org/10.1023/A:1023224123925}, language = {en}, }