@article{29411,
  author = {Vivek Prabhu and Shuhui Kang and Wen-Li Wu and Sushil Satija and Christopher Ober and Jing Sha and Peter Bonnesen},
  title = {Neutron reflectivity characterization of the photoacid reaction-diffusion latent and developed images of molecular resists for extreme-ultraviolet lithography},
  year = {2012},
  month = {2012-05-11},
  publisher = {Advanced Functional Materials},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908575},
  language = {en},
}