@article{29381, author = {Vivek Prabhu and Shuhui Kang and David VanderHart and Eric Lin and Wen-Li Wu}, title = {Photoresist latent and developer images as probed by neutron reflectivity methods}, year = {2010}, month = {2010-09-16}, publisher = {Advanced Materials}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902742}, language = {en}, }