@article{28011, author = {Ryna Marinenko and Shirley Turner and David Simons and Savelas Rabb and Rolf Zeisler and Lee Yu and Dale Newbury and Rick Paul and Nicholas Ritchie and Stefan Leigh and Michael Winchester and Lee Richter and Douglas Meier and Keana Scott and D Klinedinst and John Small}, title = {Characterization of SiGe Films for use as a National Institute of Standards and Technology (NIST) Microanalysis Reference material (RM 8905)}, year = {2010}, number = {16}, month = {2010-02-01}, publisher = {Microscopy and Microanalysis}, language = {en}, }