@conference{27391, author = {Erik Secula and David Seiler}, title = {Frontiers of Characterization and Metrology for Nanoelectronics: 2013}, year = {2013}, month = {2013-03-26}, publisher = {Frontiers of Characterization and Metrology for Nanoelectronics: 2013, Gaithersburg, MD}, language = {en}, }