@conference{27301,
  author = {Richard Silver and Bryan Barnes and Francois Goasmat and Hui Zhou and Martin Sohn},
  title = {SCATTERFIELD MICROSCOPY, REVIEW OF TECHNIQUES THAT PUSH THE FUNDAMENTAL LIMITS OF OPTICAL DEFECT METROLOGY},
  year = {2013},
  month = {2013-03-25},
  publisher = {FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2013, Gaithersburg, MD},
  language = {en},
}