@article{26801,
  author = {Janet Cassard},
  title = {New Optomechanical Technique for Measuring Layer Thickness in MEMS Processes, Journal of Microelectromechanical Systems},
  year = {2001},
  number = {10},
  month = {2001-03-01},
  publisher = {Journal of Microelectromechanical Systems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16356},
  language = {en},
}