@conference{26756,
  author = {Martin Sohn and Bryan Barnes and Richard Silver},
  title = {Quantitative Characterization and Applications of A 193 nm Scatterfield Microscope},
  year = {2013},
  month = {2013-03-25},
  publisher = {2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD},
  language = {en},
}