@misc{26751,
  author = {Janet Cassard and Jon Geist and Theodore Vorburger and David Read and Michael Gaitan and David Seiler},
  title = {User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition},
  year = {2013},
  month = {2013-02-15},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.260-177},
  language = {en},
}