@conference{26576,
  author = {Ravikiran Attota and Abraham Arceo and Bunday Benjamin},
  title = {Use of TSOM for sub-11 nm node pattern defect detection and HAR features},
  year = {2013},
  month = {2013-04-30},
  publisher = {Metrology Inspection and Process Control, San Jose, CA},
  language = {en},
}