@conference{26571,
  author = {Ravikiran Attota and Haesung Park and Victor Vartanian and Ndubuisi Orji and Richard Allen},
  title = {TSV Reveal height and bump dimension metrology by the TSOM method},
  year = {2013},
  month = {2013-04-30},
  publisher = {Metrology Inspection and Process Control, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=913667},
  language = {en},
}