@misc{26436,
  author = {Janet Cassard and Jon Geist and Theodore Vorburger and David Read and David Seiler},
  title = {User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition},
  year = {2011},
  month = {2011-09-06},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909186},
  language = {en},
}