@article{261611,
  author = {Owen Hildreth and Daniel Schmidt},
  title = {Vapor Phase Metal-Assisted Chemical Etching of Silicon},
  year = {2014},
  number = {24},
  month = {2014-06-25},
  publisher = {Advanced Functional Materials},
  doi = {https://doi.org/10.1002/adfm.201304129},
  language = {en},
}