@article{261571,
  author = {Frank DelRio and Brad Boyce and Jake Benzing and Lawrence Friedman and Robert Cook},
  title = {Shoulder fillet effects in strength distributions of MEMS components},
  year = {2020},
  month = {2020-11-06},
  publisher = {Journal of Micromechanics and Microengineering},
  doi = {https://doi.org/10.1088/1361-6439/abbf89},
  language = {en},
}