@conference{26056,
  author = {Chukwudi Okoro and Lyle Levine and Oleg Kirillov and Yaw Obeng and Ruqing Xu and Jonathan Z. and Wenjun Liu and Klaus},
  title = {X-Ray Micro-Beam Diffraction Determination of Full Stress Tensors in Cu TSVs},
  year = {2013},
  month = {2013-05-28},
  publisher = {Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV},
  language = {en},
}