@article{260271, author = {James Maslar and William Kimes and Brent Sperling and Ravindra Kanjolia}, title = {Characterization of bubbler performance for low-volatility liquid precursor delivery}, year = {2019}, number = {37}, month = {2019-06-27}, publisher = {Journal of Vacuum Science & Technology A}, doi = {https://doi.org/10.1116/1.5099264}, language = {en}, }