@conference{259566,
  author = {Ravikiran Attota},
  title = {Computational Process Control Compatible Dimensional Metrology Tool: Through-focus Scanning Optical Microscopy},
  year = {2020},
  month = {2020-09-03},
  publisher = {2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Saratoga Springs, NY},
  doi = {https://doi.org/10.1109/ASMC49169.2020.9185358},
  language = {en},
}