@article{258186,
  author = {Gheorghe Stan and Ebony Mays and Hui-Jae Yoo and Sean King},
  title = {Nanoscale tomographic reconstruction of the subsurface mechanical properties of low-k high-aspect ratio patterns},
  year = {2016},
  month = {2016-10-02},
  publisher = {ACS Nano},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920549},
  language = {en},
}