@article{256076,
  author = {Alexana Roshko and Jaclyn Springer and Steven and Andrew Cavanagh and Huaxing Sun and Paul Blanchard},
  title = {Electron-Enhanced Atomic Layer Deposition (EE-ALD) of Boron Nitride Thin Films at Room Temperature and 100°C},
  year = {2018},
  number = {122},
  month = {2018-03-29},
  publisher = {Journal of Physical Chemistry C},
  doi = {https://doi.org/10.1021/acs.jpcc.8b00796},
  language = {en},
}