@conference{255416, author = {Pragya Shrestha and Xiao Lyu and Mengwei Si and Kin Cheung and Pei Ye}, title = {First Direct Measurement of Sub-Nanosecond Polarization Switching in Ferroelectric Hafnium Zirconium Oxide}, year = {2020}, month = {2020-02-13}, publisher = {IEEE International Electron Devices Meeting (IEDM), SAn Francisco, CA}, doi = {https://doi.org/10.1109/IEDM19573.2019.8993509}, language = {en}, }