@article{253976, author = {Ndubuisi Orji and Ronald Dixson and Ernesto Lopez and Bernd Imer}, title = {Wear comparison of critical dimension-atomic force microscopy tips}, year = {2020}, number = {19}, month = {2020-03-28}, publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, doi = {https://doi.org/10.1117/1.JMM.19.1.014004}, language = {en}, }