@conference{253951,
  author = {Bryan Barnes and Mark},
  title = {Contrasting Conventional and Machine Learning Approaches to Optical Critical Dimension Measurements},
  year = {2020},
  number = {11325},
  month = {2020-03-24},
  publisher = {Proceedings of the SPIE, San Jose, CA},
  doi = {https://doi.org/10.1117/12.2551504},
  language = {en},
}