@article{252586,
  author = {Daniel Josell and Thomas Moffat},
  title = {Extreme Bottom-up Filling of Through Silicon Vias and Damascene Trenches with Gold in a Sulfite Electrolyte},
  year = {2013},
  month = {2013-06-06},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}