@article{252391, author = {Jason Gorman and Kenn Oldham and Robert M'Closkey}, title = {Introduction to the special issue on MEMS dynamics and control}, year = {2020}, number = {65}, month = {2020-02-02}, publisher = {Mechatronics}, doi = {https://doi.org/10.1016/j.mechatronics.2019.102316}, language = {en}, }