@misc{252171,
  author = {James Liddle and Jerry Bowser and Bojan Ilic and Vincent Luciani},
  title = {So, You Want to Have a Nanofab? SharedUse Nanofabrication and Characterization Facilities: Cost-of-Ownership, Toolset, Utilization, and Lessons Learned},
  year = {2020},
  number = {125},
  month = {2020-02-21},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/jres.125.009},
  language = {en},
}