@article{252036,
  author = {Berc Kalanyan and Ryan Beams and Michael Katz and Albert Davydov and James Maslar and Ravindra Kanjolia},
  title = {Atomic layer deposition of MoS2 films using bis(tert-butylimido)-bis(dimethylamido)molybdenum and 1-propanethiol},
  year = {2018},
  month = {2018-12-31},
  publisher = {Journal of Vacuum Science & Technology A},
  language = {en},
}