@conference{249931,
  author = {Darine El and Frank Seifert and Stephan Schlamminger and Leon Chao and David Newell and Jon Pratt},
  title = {Heterodyne interferometer with subnanometer accuracy},
  year = {2014},
  month = {2014-08-24},
  publisher = {CPEM 2014 Digest, Rio de Janeiro, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915347},
  language = {en},
}