@article{249506, author = {Christian Haffner and Andreas Joerg and Michael Doderer and Daniel Chelladurai and Felix Mayor and Comsin and Yuriy Fedoryshyn and Mikael Mazur and Maurizio Burla and Henri Lezec and Vladimir Aksyuk and Juerg Leuthold}, title = {Nano-opto-electro-mechanical switches operated at CMOS-level voltages}, year = {2019}, number = {366}, month = {2019-11-15}, publisher = {Science Magazine}, doi = {https://doi.org/10.1126/science.aay8645}, language = {en}, }