@article{249391,
  author = {Robert Cook and Frank DelRio and Brad Boyce},
  title = {Predicting strength distributions of MEMS structures using flaw size and spatial density},
  year = {2019},
  number = {5},
  month = {2019-11-04},
  publisher = {Microsystems & Nanoengineering},
  doi = {https://doi.org/10.1038/s41378-019-0093-y},
  language = {en},
}