@article{249296, author = {Brent Sperling and James Maslar}, title = {Experiment-based modelling of a vapor draw ampoule used for low-volatility precursors}, year = {2019}, number = {37}, month = {2019-10-22}, publisher = {Journal of Vacuum Science and Technology B}, doi = {https://doi.org/10.1116/1.5125446}, language = {en}, }