@article{248746,
  author = {Bryan Barnes and Mark-Alexander Henn and Martin Sohn and Hui Zhou and Richard Silver},
  title = {Appraising the extensibility of optics-based metrology for emerging materials},
  year = {2019},
  number = {92},
  month = {2019-10-04},
  publisher = {ECS Transactions},
  doi = {https://doi.org/10.1149/09201.0073ecst},
  language = {en},
}