@article{247916, author = {Jonathan Wyrick and Xiqiao Wang and Ranjit Kashid and Pradeep Namboodiri and Scott Schmucker and Joseph Hagmann and Keyi Liu and Michael Stewart and Curt Richter and Garnett Bryant and Richard Silver}, title = {Atom-by-Atom Fabrication of Single and Few Dopant Quantum Devices}, year = {2019}, month = {2019-08-14}, publisher = {Advanced Functional Materials}, doi = {https://doi.org/10.1002/adfm.201903475}, language = {en}, }