@article{247571,
  author = {Mark-Alexander Henn and Hui Zhou and Bryan Barnes},
  title = {Data-driven approaches to optical patterned defect detection},
  year = {2019},
  number = {2},
  month = {2019-09-05},
  publisher = {OSA Continuum},
  doi = {https://doi.org/10.1364/OSAC.2.002683},
  language = {en},
}