@article{246456, author = {Lawrence Friedman and Wen-Li Wu}, title = {Electron Reflectometry for Measuring Nanostructures on Opaque Substrate}, year = {2019}, number = {115}, month = {2019-07-08}, publisher = {Applied Physics Letters}, doi = {https://doi.org/10.1063/1.5113489}, language = {en}, }